Raevschi, Simion; Kompan, Mihail; Zhilyaev, Yurii; Gorceac, Leonid; Botnariuc, Vasile
(CEP USM, 2010)
The surface structure of AIN layers deposited on the Silicon substrates at the initial stage of germination was studied by the Atomic Force Microscopy (AFM) method. The layers have been deposited by the Hydride Vapor Phase ...