PLASMA TREATMENT AND SURFACE SENSIBILIZATION OF TIN DIOXIDE  FILMS FOR ENHANCEMENT OF GAS SENSITIVITY

Korotcenkov, Ghenadii; Brînzari, Vladimir; Dmitriev, Serghei

dc.contributor.author	Brînzari, Vladimir
dc.contributor.author	Dmitriev, Serghei
dc.contributor.author	Korotcenkov, Ghenadii
dc.date.accessioned	2018-03-30T08:26:54Z
dc.date.available	2018-03-30T08:26:54Z
dc.date.issued	2005
dc.identifier.citation	BRÎNZARI, Vl., DMITRIEV, S. et al. Plasma treatment and surface sensibilization of tin dioxide films for enhancement of gas sensitivity. In: Moldavian Journal of the Physical Sciences. 2005, nr. 1, pp. 98-101. ISSN 1810-648X.	en
dc.identifier.issn	1810-648X.
dc.identifier.uri	http://dspace.usm.md:8080/xmlui/handle/123456789/1732
dc.description.abstract	This paper presents result of investigation aimed at the improvement of gas sensitive properties of SnO2 thin film gas sensors (TFGS) by means of high frequency (HF) oxygen plasma treatment and its surface doping. Used in experiments SnO2 films were deposited by spray pyrolysis method. It is shown that plasma treatment provides 3-4 times growth of thin film gas sensitivity. Surface doping of SnO2 films with Pd leads to gas sensitivity increasing by order. It is conluded that combination of HF oxygen plasma treatment and surface sensibilization through surface doping is an effective way to considerable improvement of gas sensitive properties of tin dioxide based TFGS.	en
dc.language.iso	en	en
dc.subject	thin film	en
dc.title	PLASMA TREATMENT AND SURFACE SENSIBILIZATION OF TIN DIOXIDE FILMS FOR ENHANCEMENT OF GAS SENSITIVITY	en
dc.type	Article	en